Vacuum Rated Stepper Motors

Vacuum Rated (10-5 to 10-4 Pa) Stepper Motors

Vacuum rated motors can be installed in a vacuum environment to increase efficiency, reduce heat generation, and miniaturize overall design.

αSTEP AR Series motors reduce costs and eliminate the need for a sensor for position confirmation in a vacuum environment, while maintaining precise positioning and the high-reliability of closed-loop control. αSTEP AR Series features Current Control Mode to further reduce heat generation and magnetic noise under low-load conditions.

The PK Series vacuum rated stepper motors are 5-phase open-loop motors engineered for precise positioning inside vacuum enclosures, eliminating the need for a motion transfer device and enabling more compact system designs.

αSTEP AR Series

  • Compatible with vacuum environments of 10-5
  • High reliability via closed-loop control
  • Reduced heat generation through high efficiency
  • CE Marking (DC input)
  • AC/DC input
  • Available in 28, 42, 60, 85 mm frame sizes

PK Series

  • Compatible with vacuum environments of 10-5 (28 mm) to 10-4 Pa (42/60 mm)
  • 5-Lead-Wire motor compatible with our drivers
  • DC input (Use CVD drivers)
  • Available in 28, 42, 60 mm frame sizes