Semiconductor Industry Applications

Oriental Motor understands that space is limited and that motion performance at a reasonable price is important. Starting with the motor driver, Oriental Motor offers compact, space-saving, network-compatible drivers that can be combined with a variety of linear, rotary, and geared motors for the optimal loop performance and value.

We have compiled a list of product introduction case studies and proposals that solve issues in the development of next-generation semiconductor manufacturing equipment, such as semiconductor miniaturization, reducing carbon footprint, and cost reduction. Oriental Motor listens to the issues associated with the development of semiconductor manufacturing equipment, displays, and electronic component-related equipment, and provides high quality products worldwide, from standard products to customized products. Please contact us for any technical follow-up or to request materials and samples.


Case Studies

Product Selection by Application

Wafer Pin Lifter

Wafer Loading / Unloading

Lifting and lowering silicon wafers require precise and smooth motion in a compact design.

Wafer Handling Machine

Wafer Loading / Unloading

Handling wafer presents unique challenges like moving high inertial loads precisely and delicately.

Chemical Mechanical Polishing (CMP)

Wafer Loading / Unloading

Precise control of the swing arm position and polishing pad speed are critical for polishing wafers.

Wafer Loading / Unloading

Wafer Loading / Unloading

Wafer handling requires extreme accuracy and delicate movements while closed-loop feedback provides peace of mind.

Spraying / Cleaning Device (Nozzle) Swing Arm

Spraying / Cleaning Device (Nozzle) Swing Arm

Cleaning tool application requires high torque, precise positioning, and the ability to control torque.

CMP CUP Lifting

CMP CUP Lifting

Lifting mechanism in semiconductor tool requires high torque and synchronous motion in a small footprint.



Engineering Notes
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