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Semiconductor Case Study - Compact Multi-Axis Driver Installation

Compact Multi-Axis Driver Installation to Reduce the Footprint and Save Space

In today’s advanced semiconductor manufacturing equipment, cleanroom space is always at a premium. These tools often utilize many motors and drivers for each process step on the tool. In order to improve productivity in next-generation semiconductor manufacturing equipment, it is essential to achieve a reduction in the footprint while ensuring top motion performance with an affordable solution. Standardizing on a Motor family that serves as the base for various motion configurations, including motors, gears, linear and rotary actuators, and built-in lead screw actuators, can provide additional benefits in design and performance results while meeting demanding application requirements.

Challenge:

Limited Space for Driver
Reduce Cables & Wiring
Incorporate Network Control
Standard Closed-Loop Motion Feedback

Solution:

Multi-Axes Drivers based on the αSTEP Hybrid Step-Servo technology

Multi-Axis Drivers

AZ Series Multi-Axis Drivers

By using a multi-axis driver, up to 4 αSTEP motors or actuators can be controlled from a single driver.

2-axis, 3-axis and 4-axis driver connections are available.

24/48VDC
Works with AZ Series DC Input stepper motors and actuators
Multi-Axis Motor Connection Cables required

*Call for support with SSCNETIII/H or Mechatrolink, 1-800-GO-VEXTA (468-3982)

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AZ Series Motors and Actuators

Eliminate Extra Sensors with a Battery-Free Absolute System

The αSTEP AZ Series Mechanical Absolute Encoder is available as a leading closed loop, battery free absolute motion solution sold as a Stepper Motor + Driver or Linear Actuator + Driver allowing for absolute, battery free, advanced performance across a wide range of applications.