Case Study of Vacuum Chamber Miniaturization

Motor is Installed inside the Vacuum Chamber, Making It Possible to Reduce the Size of the Equipment

AR Series Vacuum Type can be used in a high vacuum (10-5 Pa) environment. Since the motor can be installed inside the vacuum chamber, there is no need for a rotary feedthrough, belt, or pulley. Saves space and reduces the size of the equipment.

Designed to Prevent Contamination of the Chamber

To reduce the generation of gas, the surface of the motor is not painted and vacuum grease is used for the bearings. The main residual gases will be the same as those found in a normal, clean environment, so there is no need to worry about contamination of the vacuum chamber.

Motor Status Feedback is Possible Even in a Vacuum Chamber

Since it is equipped with a vacuum-compatible resolver sensor, it can monitor position information and conditions such as overload in the same way as a servo motor.

Resolver Sensor Structure for Vacuum